¡ß Ultra high purity pressure gauge ¡ß
¡Ü Model : P810
¡Ü Service intended :
P810 series are specifically designed for the ultra high purity gas distribution system used in semiconductor. electronic. medical. biotechnology and pharmaceutical industry.
¡Ü Nominal diameter : 50mm(2"), 63mm(2 1/2")
¡Ü Accuracy :
- Grade A (ASME B40.1)
- Lower 1/4 of scale - ¡¾ 2.0% of span
- Middle 1/2 of scale - ¡¾ 1.0% of span
- Upper 1/4 of scale - ¡¾ 2.0% of span
- Class 1.6 (EN837-1) - ¡¾ 1.6% of span
- Class 1.0 (EN837-1) - ¡¾ 1.0% of span - optional
¡Ü Scale range : 0.1 vaccum to 25MPa or 28MPa
¡Ü Working pressure :
- Steady pressure : 75% of full scale value
- Fluctuating pressure : 67% of full scale value
¡Ü Working temperature :
- Ambient : -40 ~ 60 ¡ÆC
- Medium : +100 ¡ÆC maximum
¡Ü Pressure connection :
- Type 316L stainless steel electropolished
- Low mount or center back mount
- Surface finish Ra¡Â0.25§
- VCR male or female face seal fitting
¡Ü System filling :
- USP grade glycerine (99.5% pure)
- Option : food grade silicon oil
¡Ü Pressure element :
¡¤Type 316L stainless steel
¡¤< 6MPa : C-type bourdon tube
¡¤6MPa : helical type bourdon tube
¡Ü Movement : Stainless steel
¡Ü Dial : White alumium with pointer stop pin with black/red lettering- dual pressure scale(bar/psi)
¡Ü Pointer : Black aluminum pointer
¡Ü Case : Type 304 stainless steel- electropolished with pressure relief
¡Ü Ring and window :
- Twist-lock polycarbonate
- Helium leak rate
- Tested to confirm leakage rates of less than
- 10-9 mbar-§¤ /sec
¡Ü Optional : 100mm - P252 dimension
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